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About Machine of 4F
光電元件製作
高溫擴散爐
反映離子蝕刻系統
(RIE)
電子鎗真空蒸鍍系統
(E-Gun)
快速熱退火(RTA)
表面輪廓儀
(Alpha-Step)
曝光機
旋轉塗佈機(Spin-Coater)
光電元件製作、量測與應用電應用實驗室
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